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专利名称：Processing apparatus发明人：Yaegashi, Hidetami,Toshima,
Takayuki,Akimoto, Masami,Yamaguchi,Eiji,Kitano, Junichi,Katano, Takayuki,Shinya,Hioshi,Iida, Nauaki
申请号：EP05023272.7申请日：19970124公开号：EP16329A2公开日：20060308
专利附图：
摘要：A processing apparatus comprising a plurality of process unit groups (G1 to G5)
each including a plurality of process units to subject an object (w) to a series of processes,said process units being arranged vertically in multiple stages, an object transfer space(22) being defined among the process unit groups (G1 to G5); transfer means (21) fortransferring the object (w), said transfer means (21) having a transfer member (73, 78a,78b, 78c) vertically movable in the object transfer space (22), said transfer member (73,78a, 78b, 78c) being capable of transferring the object (w) to each of said process units;and means (20b, 50 to 62, 84, 95, 95a, 96, 114, 114a, 115, 115a) for reducing a variation incondition of the object transfer space (22), the processing apparatus further comprisingat least one first process unit group (G1, G2) in which process units including a resistcoating unit for coating a resist and a developing unit for developing a pattern of theresist are vertically stacked; and at least one second process unit group (G3, G4, G5) inwhich at least one or all of an alignment unit for aligning an object to be processed, abaking unit for baking the object, a cooling unit for cooling the object, an adhesion unitfor subjecting the object to an adhesion process, and an extension unit are verticallystacked, wherein said first process unit group (G1, G2) has such an arrangement that thecoating unit is placed below the developing unit.
申请人：TOKYO ELECTRON LIMITED
地址：3-6, Akasaka 5-chome, Minato-ku Tokyo 107 JP
国籍：JP
代理机构：HOFFMANN EITLE
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