专利内容由知识产权出版社提供
专利名称：Processing apparatus
发明人：Kasumi, Kazuyuki,Ota, Hirohisa,Kawakami,
Eigo,Nakamura, Takashi,Tokita, Toshinobu
申请号：EP05006760.2申请日：20050329公开号：EP1582924A3公开日：20091111
专利附图：
摘要：A processing apparatus for transferring a relief pattern on a mold to a resist ona substrate through a compression of the mold against the resist, includes a supplier forsupplying the resist between the substrate and the mold, and a recovery unit for
recovering the resist.
申请人：CANON KABUSHIKI KAISHA
地址：3-30-2, Shimomaruko, Ohta-ku Tokyo JP
国籍：JP
代理机构：TBK-Patent
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