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专利名称：APPARATUS FOR MIXING VAPORIZED
PRECURSOR AND GAS AND METHODTHEREFOR
发明人：Lewis A. Bernstein,Dana Craig
Bookbinder,Jason A. Dillard,Jennifer L.Porter,Balram Suman,Pushkar Tandon
申请号：US13176804申请日：20110706
公开号：US20130011319A1公开日：20130110
专利附图：
摘要：An apparatus for mixing a vaporized precursor with a gas for producing silicaparticles is provided. The apparatus includes a mixer housing, a precursor deliverychamber having an output in communication with the mixer housing for delivering avaporized precursor in the mixer housing, and an oxidizing gas delivery chamber having anoutput in communication with the mixer housing for delivering an oxidizing gas to bemixed with the vaporized precursor. The apparatus further includes a flashback memberdisposed within the mixer housing and between the output of the precursor deliverychamber and the output of the oxidizing gas delivery chamber. The flashback member islocated at a minimum distance from the output of the oxidizing gas delivery chamberdefined by L(cm)=0.453 U (Re), wherein U is the flow rate in cm/sec of precursor and Re isthe flow Reynolds number. The flashback member may include a tapered surface on atleast one side to reduce recirculation of vaporized gas.
申请人：Lewis A. Bernstein,Dana Craig Bookbinder,Jason A. Dillard,Jennifer L.Porter,Balram Suman,Pushkar Tandon
地址：Wilmington NC US,Corning NY US,Wilmington NC US,Wilmington NC US,Katy TXUS,Painted Post NY US
国籍：US,US,US,US,US,US
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