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专利名称：Method and apparatus for reliability testing
of integrated circuit structures and devices
发明人：Nguyen Duc Bui,Michael Anthony
Niederhofer,Van Hung Pham
申请号：US008794申请日：19970808公开号：US06329831B1公开日：20011211
专利附图：
摘要：A method and apparatus for monitoring and controlling integrated circuitdevices-under-test (DUTS). A preferred embodiment includes a computer based
controller, a temperature control module, a power supply controller, a chamberinterface module, a driver card and a DUT board. The computer-based controllerresponding to preprogrammed instructions (software) operates and coordinates thetemperature control module, the chamber interface module, the power supplycontroller, and the driver card. The driver card, receiving commands and data from thecomputer-based controller, sends and receives a number of signals to and from theDUTs on the DUT board. These signals include voltage sources for operating the DUTs, aload voltage, DC current sources for setting duty and frequency cycles, switch signals,voltage measurement signals, and resistance measurement signals. The DUT board is aprinted circuit board for holding a number of DUTs. Each of the DUTs is an integratedcircuit containing one or more sets of circuitry for testing specifically designed teststructures.
申请人：ADVANCED MICRO DEVICES, INC.
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