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专利名称：PLASTIC MATERIAL
发明人：ENSINGER, WILFRIED,RESAVAGE, LAWRENCE,
G.
申请号：EP058228.4申请日：20051217公开号：EP1831290A1公开日：20070912
摘要：The invention relates to plastic material which is used to produce tribologicallystressed components, in particular, maintaining rings which are used to maintain semi-conductor wafers in chemical/mechanical polishing devices. The invention also relates tothe thus produced maintaining rings to a method for the production thereof. The aim ofthe invention is the considerably prolong the service life of said maintaining rings. As aresult, the plastic material contains a plastic matrix and a particle-shaped TiC which isembedded therein.
申请人：ENSINGER KUNSTSTOFFTECHNOLOGIE GBR
地址：Rudolf-Diesel-Strasse 8 71154 Nufringen DE
国籍：DE
代理机构：Wössner, Gottfried
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