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专利名称：Mems sensor capable of sensing
acceleration and pressure
发明人：Kazuhiro, Okada,Wu, Ming-Ching,Huang,
Chih-Kung,Biar, Jin-Chyuan
申请号：EP101638.9申请日：20101102公开号：EP2431722A2公开日：20120321
专利附图：
摘要：A MEMS sensor (10) capable of sensing acceleration and pressure includes aframe (12), a proof mass (14) and flexible bridges (16a-d) connected between the frame
and the proof mass in such a way that the proof mass is moveably suspended inside theframe. The proof mass is provided with a pressure sensing diaphragm (14a) and a sealedchamber (14b) corresponding to the diaphragm such that the proof mass is not onlyserved as a moveable sensing element for acceleration measurement but also a pressuresensing element.
申请人：Domintech Co., LTD.,Kazuhiro, Okada
地址：No.31, Wugong 5th Rd., Wugu Township, Taipei County 248 TW,73, Sugaya 4-chome Ageo-shi Saitama JP
国籍：TW,JP
代理机构：Becker Kurig Straus
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