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专利名称：Integrated terahertz imaging systems发明人：Kaushik Sengupta,Seyed Ali Hajimiri申请号：US14150670申请日：20140108公开号：US09269731B2公开日：20160223
专利附图：
摘要：A low-power 4×4-pixel THz camera with responsivity greater than 2.5 MV/Wand sub-10 pW/√Hz NEP at 0.25 THz is integrated in 130 nm silicon without using eitherhigh-resistivity substrates or silicon lenses. Imaging results with a fully integratedradiating CMOS power source demonstrate the first entirely silicon-based THz imager.
申请人：California Institute of Technology
地址：Pasadena CA US
国籍：US
代理机构：Alston & Bird LLP
代理人：Ardeshir Tabibi, Esq.
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