专利内容由知识产权出版社提供
专利名称：Ethylene terephthalate polymer retaining
ring for a chemical mechanical polishinghead
发明人：Gerard Stephen Moloney,Peter Lao申请号：US11542303申请日：20061002
公开号：US20080051011A1公开日：20080228
专利附图：
摘要：Embodiments of a retaining ring for use with a chemical mechanical polishingprocess with a body including a polyethylene terephthalate polymer or polymer
including ethylene terephthalate monomers are disclosed.
申请人：Gerard Stephen Moloney,Peter Lao
地址：Sacramento CA US,Elk Grove CA US
国籍：US,US
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