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专利名称：Optical displacement measuring instrument发明人：Yutaka, Miki申请号：EP08022259.9申请日：20081222公开号：EP2075550A2公开日：20090701
专利附图：
摘要：An optical displacement measuring instrument includes a focusing unit (220) forbringing a focal point of an objective lens (170) into coincidence with a measuring face(901). The focusing unit splits reflected light reflected on the measuring face into twosplit light of first reflected light and second reflected light. The focusing unit includes:
first and second light-receiving element arrays (237A, 237B) respectively disposedanterior to an image-forming point of the first reflected light and posterior to an image-forming point of the second reflected light; and a light-receiving signal calculator (focal-point detecting circuit (232)) that, among light-receiving signals from a plurality of pixelswithin an area predetermined in each of the first and second light-receiving elementarrays, excepts light-receiving signals from pixels having the highest brightness to the nthhighest brightness (n being an integer) and calculates the total value of light-receivingsignals from the remaining pixels. A position of a focusing lens (130) is controlled suchthat the total values of the light-receiving signals of the first and second light-receivingelement arrays become equal to each other, thereby bringing the focal point of theobjective lens into coincidence with the measuring face.
申请人：Mitutoyo Corporation
地址：20-1, Sakado 1-chome, Takatsu-ku Kawasaki-shi, Kanagawa 213-8533 JP
国籍：JP
代理机构：Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät
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