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专利名称：Method for manufacturing a semiconductor
material integrated microactuator, inparticular for a hard disc mobile read/writehead, and a microactuator obtained thereby
发明人：Paolo Ferrari,Benedetto Vigna申请号：US09768777申请日：20010122
公开号：US20010009776A1公开日：20010726
摘要：The integrated microactuator has a stator and a rotor having a circularextension with radial arms which support electrodes extending in a substantiallycircumferential direction and interleaved with one another. For the manufacture, first asacrificial region is formed on a silicon substrate; an epitaxial layer is then grown; thecircuitry electronic components and the biasing conductive regions are formed;
subsequently a portion of substrate beneath the sacrificial region is removed, forming anaperture extending through the entire substrate; the epitaxial layer is excavated todefine and separate from one another the rotor and the stator, and finally the sacrificialregion is removed to release the mobile structures from the remainder of the chip.
申请人：FERRARI PAOLO,VIGNA BENEDETTO
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