专利内容由知识产权出版社提供
专利名称：A method and apparatus for acquiring
information of a biochip
发明人：Okamoto, Tadashi,Takase,
Hiromitsu,Hashimoto, Hiroyuki
申请号：EP03014310.1申请日：20030625公开号：EP1376652A3公开日：20060215
摘要：A measurement method is provided, which enables to obtain a two-dimensionalimage with better quantitative-ability by suppressing the influence of the charging-up,when the two-dimensional secondary ion image is obtained for a biological-relatedmaterial fixed on a substrate having high resistivity by utilizing TOF-SIMS method in acertainly wide area. Two-dimensional image having considerably high positioningresolution-ability can be obtained by the procedure, in which the pulsed primary ionbeam is irradiated at a spot, and the pulse-wise spot-applications of the primary ion beamand the simultaneous detection of the secondary ion generated from the irradiatedprimary ion beam are proceeded along with a discontinuous scanning pattern, andeventually the results of these secondary ion measurements results is reconstructed intoa two-dimensional image in line with the aforementioned discontinuous scanning pattern.
申请人：CANON KABUSHIKI KAISHA
地址：3-30-2 Shimomaruko Ohta-ku, Tokyo JP
国籍：JP
代理机构：TBK-Patent
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